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| ¼¤¹â²¨³¤·¶Î§£¨nm£© | 1060~1080 | ||
| ÊäÈë¹âÏËÀàÐÍ | 20/130 or 25/250 or 30/250(NA=0.065) | ||
| Êä³ö¹âÏËÀàÐÍ | 100/120/360, NA=0.22 | ||
| µ¥¶Ë³ÐÊܹ¦ÂÊ£¨W£© | 3000 | ||
| ñîºÏЧÂÊ£¨%£© | ≥98 | ||
| ×î´ó»Ø·µ¹â³ÐÊܹ¦ÂÊ£¨W | 1000 | ||
| BPP£¨mm×mrad£© | 3~4 | ||
| ÔËÐÐζȣ¨¡æ£© | 0 ~ +65 | ||
| ´¢´æζȣ¨¡æ£© | -40 ~ +85 | ||
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